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Semi-H3PO4

OCI produces the high-purity phosphoric acid required in semiconductor production.

Product Features

Semi-H<sub>3</sub>PO<sub>4</sub>

Semi-H3PO4

Usage

Semiconductor wafer etchant material, LCD Etchant Material

Production Process

P4(yellow phosphorus) is combusted and undergoes hydration and refinement to produce Phosphoric Acid (75%, 85%). Additional refinement is executed to produce high-purity Phosphoric Acid for semiconductors.

OCI Status

Gunsan Plant

Gunsan Plant

OCI started production of Phosphoric Acid (H3PO4) at the Incheon Plant in 1980, and LCD-grade Phosphoric Acid production started at the Gunsan Plant in 2003. OCI started supplying high-purity Phosphoric Acid to Samsung Electronics in 2008, and expanded supply to the world's leading semiconductor companies.

Business Commencement

2007

Production Plant Status

Gunsan Plant

Key Point

  • Manufacture of Phosphoric Acid by dry process

    Semiconductor-grade phosphoric acid manufacturer using dry processs

  • Leading Technology

    Far lower metal content in semi-conductor process compared to competitors.

Details

  • Product Name : Phosphoric Acid
  • Chemical Formula : Semi-H3PO4
  • CAS No. : 7664-38-2
  • Certification : : OHSAS 18001, RoHS, ISO 9001, ISO 14001
  • Tel : +82-2-727-9486
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