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Semi-H3PO4

OCI produces the high-purity phosphoric acid required in semiconductor production.

Product Features

Semi-H<sub>3</sub>PO<sub>4</sub>

Semi-H3PO4

Usage

Semiconductor wafer etchant material, LCD Etchant Material, Food Additives, Metal Surface Treatment Agents

Production Process

P4(yellow phosphorus) is combusted and undergoes hydration and refinement to produce phosphoric acid (75%, 85%). Additional refinement is executed to produce high-purity phosphoric acid for semiconductors.

OCI Status

Gunsan Plant

Gunsan Plant

OCI started production of phosphoric acid (H3PO4) at the Incheon Plant in 1980, and LCD-grade phosphoric acid production started at the Gunsan Plant in 2003. OCI started supplying high-purity phosphoric acid to Samsung Electronics in 2008, and has expanded into the global high-purity phosphoric acid market including Taiwan, the United States and the Philippines

Business Commencement

2007

Production Plant Status

Gunsan Plant, Commercial Production in 2007

Major Markets

Taiwan, USA

Key Point

  • Dry process phosphorus acid production

    Korea’s only dry process phosphorus acid production for semiconductors

  • Leading Technology

    Far lower metal content in semi-conductor process compared to competitors.

Details

  • Product Name : Phosphoric Acid
  • Chemical Formula : Semi-H3PO4
  • CAS No. : 7664-38-2
  • Certification : : OHSAS 18001, RoHS, ISO 9001, ISO 14001
  • Tel : 82-2-727-9486
  • E-mail : SCB@oci.co.kr
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